Study of a scalable large-area radio-frequency helicon plasma source

نویسندگان

  • T. Windisch
  • K. Rahbarnia
  • O. Grulke
  • T. Klinger
چکیده

A large-area planar spiral antenna has been installed on the linear laboratory device VINETA. For low radio-frequency (RF ) powers the induction coil is operated in the inductive discharge mode with typical plasma densities of n ≈ 1 · 10 m and electron temperatures of Te ≈ 5 eV. At higher RFpowers a transition to the helicon wave sustained discharge mode is observed, in which the density increases by a factor of 200 and Te drops by a factor of 2. Detailed measurements of the helicon wavefield show that a helicon wave with azimuthal modenumber m = 0 is launched. Due to the larger wave excitation region of the m = 0 discharges the width of the plasma density profile in the helicon mode increases by a factor of 1.5 compared the standard VINETA helicon operation with a helical m = +1 antenna. PACS numbers: 52.50.-b,52.40.Fd

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Large-area helicon plasma source with permanent magnets

Abstract A helicon plasma source has been designed using annular permanent magnets to produce the required DC magnetic field (B-field). With the discharge tube located in the remote field, rather than the internal field of the magnet rings, the plasma can be injected into a processing chamber containing the substrate to be treated. The discharge tube, radiofrequency (RF) antenna and magnet size...

متن کامل

Performance of a permanent-magnet helicon source at 27 and 13 MHz

A small helicon source is used to create dense plasma and inject it into a large chamber. A permanent magnet is used for the dc magnetic field (B-field), making the system very simple and compact. Though theory predicts that better antenna coupling will occur at 27.12 MHz, it was found that 13.56 MHz surprisingly gives even higher density due to practical effects not included in theory. Complet...

متن کامل

Using a helicon source to simulate atmospheric re-entry plasma densities and temperatures in a laboratory setting

The purpose of this research is to develop a plasma system capable of reproducing plasma densities found during atmospheric re-entry of a capsule. We developed a 150 mm diameter helicon source at the University of Michigan Plasmadynamics and Electric Propulsion Laboratory (PEPL) and used a Langmuir probe to characterize plasma properties downstream. The helicon source was operated with argon ga...

متن کامل

Ion production cost of a gridded helicon ion thruster

Helicon plasma sources are capable of efficiently ionizing propellants and have been considered for application in electric propulsion. However, studies that estimate the ion production cost of the helicon plasma source are limited and rely on estimates of the extracted ion current. The ion production cost of a helicon plasma source is determined using a gridded ion thruster configuration that ...

متن کامل

Parallel solution of surface-volume integral equations for the design of Helicon plasma thrusters

Radiofrequency (RF) magnetized Helicon plasma sources have been proposed as propulsive devices for space thrusters. In order to optimize the antenna-plasma coupling in a Helicon source the ADAMANT code, which implements the numerical solution of surface-volume integral equations, has been developed; the approach lends itself to parallel execution. Results concerning the speed-up obtained throug...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

عنوان ژورنال:

دوره   شماره 

صفحات  -

تاریخ انتشار 2010